Agilent Technologies E5071C User Manual Page 14

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Accurate, easy-to-use solution
for on wafer test
Simplify material evaluation
On-wafer measurements
For successful evaluation of on-wafer semiconductor or RF
MEMS devices, the total accuracy of your measurement
system and easy operation are crucial. The ENA offers
state-of-the-art features for accurate measurements
and compatibility with many probe systems.
On-wafer measurements
A complete solution for your on-wafer measurements.
Accurate calibration at probe tips
Supported by IC-CAP and ADS connection manager
Supported by popular on-wafer calibration software
Two GSGSG probe contacts using a 4-port test set
Material measurements
Simplifiy your material test in the RF range by combining
the ENA with ready-to-use Agilent Materials software and
probe kits. The ENAs highly-accurate measurements will
help you determine the highest performing materials for
your application, shortening your design time.
Dielectric Constant
Measure the dielectric characteristics over a wide
frequency range.
Supported by 85071E Material Measurement software
and the 85070E probe system
Application Note: In-Fixture Characterization Using the ENA Series RF
Network Analyzer with Cascade Microtech Probing System,
http://cp.literature.agilent.com/litweb/pdf/5988-6522EN.pdf
For additional information regarding Cascade Microtech, visit:
www.cascademicrotech.com
For additional information regarding material software, visit:
www.agilent.com/find/materials
Agilent ENA and Cascade Sumimit 12000
85070E Dielectric Probe Kit
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