Agilent Technologies 8114A User Manual

General DescriptionThe Agilent 4073A Ultra Ad-vanced Parametric Tester isdesigned to perform fast andprecise DC measurements,capacitance measurements

10Agilent SemiconductorProcess Evaluation CoreSoftware (SPECS)Agilent SPECS is a test shellenvironment for the Agilent 4070Series.InputUser interactio

11Recommended Conditionsfor Low Current and LowVoltage MeasurementsIn addition to the conditionslisted in General Specifications,Agilent Technologies

For more information about Agilent Technologiesand its products, go to www.agilent.com.For more information about Agilent parametrictest products, app

General Description(continued)High-Frequency Pulse Force:PGU OptionSupported pulse generators:Agilent 81110A and 8114AMaximum number of installablepul

Maximum DUT Pins48 output pins plus one pin forthe prober chuck connection(triaxial connector). Only theE3122A (high-resolution pinboard) can be used

Pulse SwitchThe pulse switch includes sevensemiconductor switching relays,for reliable and direct control ofpulse shaping by the pulsegenerator or CPU

Voltage Source/Monitor Range, Resolution, and Accuracy using MPSMU and HPSMUForce Accuracy is calculated as follows:±(a % of output setting value + b%

Maximum Output Voltage/CurrentOver Current Range:15% of range (0% for 100 mArange of MPSMU/HRSMU, 0%for 1 A range of HPSMU, 5% for10 pA/100 pA range o

SMU configurationMinimum configuration:One HRSMU and two MPSMUs(default configuration)A maximum of two HRSMUs canbe installed and connected onlyto the

8Supported Pulse Generators: 81110A and 8114AMaximum Number of Installable PulseGenerators:81110A × 5 (without 8114A)81110A × 4 (with 8114A × 1)81110A

9accurate pulse width andpulse delay than normalmode).Note: Agilent 8114A does not support pattern mode.Load impedance999 kΩ (default), selectable fro