Agilent Technologies B1500A User's Guide

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Summary of Contents

Page 1 - Semiconductor Device Analyzer

Keysight Technologies B1500A Semiconductor Device AnalyzerUser’s Guide

Page 2

Power Supply and Measurement Safety•Power Supply SafetyThis instrument can output high currents and voltages. Make sure that the load or device under

Page 3

3- 22 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTo install 16495K Fix your necessary 16495 connector plates to the shi

Page 4

Keysight B1500A User’s Guide, Ed ition 14 3- 23InstallationInstalling AccessoriesTo connect SCUU/GSWU 1To attach the SCUU to the B1500A:1. Attach the

Page 5

3- 24 Keysight B1500A User’s Guide, Edition 14InstallationInstalling Accessories2. Fix the SCUU inside or outside the shielding box. The SCUU must be

Page 6 - Safety Summary

Keysight B1500A User’s Guide, Ed ition 14 3- 25InstallationInstalling AccessoriesTo Connect GNDU AdapterThe ground unit (GNDU) output is the single tr

Page 7

3- 26 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTo Connect MCSMU Connection BoxKeysight N1255A connection box is used

Page 8 - Safety Symbols

Keysight B1500A User’s Guide, Ed ition 14 3- 27InstallationInstalling AccessoriesFigure 3-9 N1255A Internal Connections• SW1: Kelvin/Non-Kelvin select

Page 9

3- 28 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesNOTESeries Resistor and Shunt ResistorThe series resistor and the shun

Page 10

Keysight B1500A User’s Guide, Ed ition 14 3- 29InstallationMounting ConnectorsMounting Connectors Previous sections described how to install the avail

Page 11 - Circuit Common

3- 30 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTable 3-5 Recommended Parts Table 3-6 Dimensions of Connector Holes Usage

Page 12

Keysight B1500A User’s Guide, Ed ition 14 3- 31InstallationMounting ConnectorsTo Make an Interlock Circuit The interlock circuit is designed to preve

Page 13

• Source/Monitor TerminalsSource/monitor unit, SMU, can simultaneously perform DC voltage or current output and measurement. Typical SMU has the Forc

Page 14

3- 32 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsInstalling the interlock circuitInstall the interlock circuit as follows:

Page 15

Keysight B1500A User’s Guide, Ed ition 14 3- 33InstallationMounting ConnectorsFigure 3-13 Dimensions of the Interlock Switch (N1254A-402) Figure 3-14

Page 16 - Product Stewardship

3- 34 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTo Connect GNDU Output The GNDU output connection examples are shown in T

Page 17 - Precautionary Statement

Keysight B1500A User’s Guide, Ed ition 14 3- 35InstallationMounting ConnectorsTo Connect SMU Output The SMU output connection examples are shown in Ta

Page 18 - Working in Comfort

3- 36 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTable 3-8 SMU Output ConnectionsNOTETo Minimize Leakage CurrentFor the hi

Page 19

Keysight B1500A User’s Guide, Ed ition 14 3- 37InstallationMounting ConnectorsFigure 3-16 ASU Output Kelvin Connection (Remote Sensing)The ASU inputs

Page 20 - In This Manual

3- 38 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsFigure 3-17 ASU Output non-Kelvin ConnectionThe ASU inputs can be connect

Page 21 - Contents

Keysight B1500A User’s Guide, Ed ition 14 3- 39InstallationMounting ConnectorsFigure 3-18 SCUU Output Kelvin Connection (Remote Sensing)The SCUU shoul

Page 22

3- 40 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsFigure 3-19 SCUU Output non-Kelvin ConnectionThe SCUU should be connected

Page 23

Keysight B1500A User’s Guide, Ed ition 14 3- 41InstallationMounting ConnectorsTo Connect MCSMU OutputThe MCSMU output connection example is shown in F

Page 24

High Voltage Shock HazardKeysight B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for MPSMU/HRSMU) at the Force, Guard, and Sense ter

Page 25 - 1 Getting Started

3- 42 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTo Connect MFCMU OutputThe MFCMU output connection example is shown in Fi

Page 26

Keysight B1500A User’s Guide, Ed ition 14 3- 43InstallationConnecting Measurement DevicesConnecting Measurement DevicesThis section describes how to c

Page 27 - + UsbDevice1

3- 44 Keysight B1500A User’s Guide, Edition 14InstallationConnecting Measurement DevicesUsing Test Fixture1. Press the Stop key to set the output off.

Page 28 - To Turn B1500A Off

Keysight B1500A User’s Guide, Ed ition 14 3- 45InstallationConnecting Measurement DevicesConnections for High Current MeasurementsWhen you force or me

Page 29

3- 46 Keysight B1500A User’s Guide, Edition 14InstallationConnecting Measurement DevicesUsing Connector PlateThis section provides the information use

Page 30 - To Launch EasyEXPERT

Keysight B1500A User’s Guide, Ed ition 14 3- 47InstallationConnecting Measurement DevicesWARNING To prevent electrical shock and DUT damage, do not co

Page 31 - If Only One Workspace Exists

3- 48 Keysight B1500A User’s Guide, Edition 14InstallationConnecting Measurement DevicesTo Measure Low ResistanceWhen you measure a low resistance, hi

Page 32 - To Create Workspace

Keysight B1500A User’s Guide, Ed ition 14 3- 49InstallationConnecting Measurement DevicesWARNING To prevent electrical shock and DUT damage, do not co

Page 33 - To Select Workspace

3- 50 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching MatrixCapacitance Compensation When Using Swit

Page 34 - To Use Tracer Test Mode

Keysight B1500A User’s Guide, Ed ition 14 3- 51InstallationCapacitance Compensation When Using Switching MatrixRequired ConditionsThe following condit

Page 35

Gefahr durch HochspannungVon den Geräten Keysight B1500A können Spannungen an den Anschlüssen “Force”, “Guard” und “Sense” von bis zu 200 V ausgehen.

Page 36 - To Use Application Test Mode

3- 52 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching MatrixIn Figure 3-22, C1 (DATA04), C2H (DATA05

Page 37 - Test Definitions

Keysight B1500A User’s Guide, Ed ition 14 3- 53InstallationCapacitance Compensation When Using Switching MatrixTo Create Compensation Data FileThis se

Page 38 - To Use Classic Test Mode

3- 54 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching Matrix• For E5250A:The lines DATA05 to DATA08

Page 39

Keysight B1500A User’s Guide, Ed ition 14 3- 55InstallationCapacitance Compensation When Using Switching Matrix2. Measure the R, L, C values of the fo

Page 40 - To Perform Measurement

3- 56 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching MatrixTo obtain compensation coefficientsObtai

Page 41 - To Use Test Result Editor

Keysight B1500A User’s Guide, Ed ition 14 3- 57InstallationCapacitance Compensation When Using Switching MatrixTable 3-11 Template Compensation Data F

Page 42 - To Use Analysis Tools

3- 58 Keysight B1500A User’s Guide, Edition 14InstallationMaintenanceMaintenanceMaintenance should be performed periodically to keep the instrument in

Page 43 - 2Introduction

Keysight B1500A User’s Guide, Ed ition 14 3- 59InstallationAbout Plug-in ModulesAbout Plug-in ModulesThis section describes the following notices abou

Page 44 - Application Library

3- 60 Keysight B1500A User’s Guide, Edition 14InstallationAbout Plug-in ModulesTo Interconnect SPGUsIf multiple SPGUs have been installed, connect the

Page 45 - Overview

Keysight B1500A User’s Guide, Ed ition 14 3- 61InstallationAbout Plug-in ModulesTo Interconnect WGFMUsIf multiple WGFMUs have been installed, connect

Page 46

Danger de choc dû à une haute tensionUne tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Key

Page 47

3- 62 Keysight B1500A User’s Guide, Edition 14InstallationAbout Plug-in ModulesAbout Module InstallationModule installation must be carried out at a K

Page 49

4- 2 Keysight B1500A User’s Guide, Edition 14SpecificationsThis chapter describes the specifications and supplemental characteristics for Keysight B15

Page 50 - Front View

Keysight B1500A User’s Guide, Ed ition 14 4- 3SpecificationsHardwareHardwareSpecification ConditionsThe measurement and output accuracy are specified

Page 51

4- 4 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareSupported Plug-in ModulesThe B1500A supports ten slots for the following plug-in mo

Page 52

Keysight B1500A User’s Guide, Ed ition 14 4- 5SpecificationsHardware• Spot, sweep, and more measurement capabilities• Sampling (time domain) measureme

Page 53 - Rear View

4- 6 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• Ultra-fast IV measurement capability for the pulsed IV and transient IV such as N

Page 54

Keysight B1500A User’s Guide, Ed ition 14 4- 7SpecificationsHardwareGround Unit (GNDU)The GNDU is furnished standard with the mainframe.• Output volta

Page 55

4- 8 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareMPSMU/HRSMUMPSMU: Medium Power Source/Monitor UnitHRSMU: High Resolution Source/Mon

Page 56

Keysight B1500A User’s Guide, Ed ition 14 4- 9SpecificationsHardwareTable 4-1 Voltage range, resolution, and accuracy (high resolution ADC)Table 4-2 C

Page 57

高電圧感電注意Keysight B1500A の Force、Guard、Sense 端子には、危険電圧が出力されることがあります(HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100 Vdc)。感電事故防止のため、必ず以下の事柄を守ってください。•3 極電源

Page 58

4- 10 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-3 Voltage range, resolution, and accuracy (high speed ADC)Table 4-4 Curren

Page 59 - Measurement Modules

Keysight B1500A User’s Guide, Ed ition 14 4- 11SpecificationsHardwareASUASU: Atto Sense and Switch Unit• Maximum voltage, AUX path100 V (AUX input to

Page 60 - About SMU

4- 12 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareHPSMUHPSMU: High Power Source/Monitor Unit• Voltage range, resolution, and accurac

Page 61 - HPSMU - High Power SMU

Keysight B1500A User’s Guide, Ed ition 14 4- 13SpecificationsHardwareTable 4-5 Voltage range, resolution, and accuracy (high resolution ADC)Table 4-6

Page 62

4- 14 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-7 Voltage range, resolution, and accuracy (high speed ADC)Table 4-8 Curren

Page 63

Keysight B1500A User’s Guide, Ed ition 14 4- 15SpecificationsHardwareMCSMUMedium Current Source/Monitor Unit• Voltage range, resolution, and accuracyS

Page 64 - MPSMU - Medium Power SMU

4- 16 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-9 MCSMU voltage range, resolution, and accuracyTable 4-10 MCSMU current ra

Page 65

Keysight B1500A User’s Guide, Ed ition 14 4- 17SpecificationsHardwareSMU Common Specifications• Output terminal/connectionDual triaxial connector, Kel

Page 66

4- 18 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareFor MCSMU• Width: 10 s to 100 ms (1 A range), 10 s to 2 s (10 A to 100 mA range

Page 67 - Before using 1 pA range

Keysight B1500A User’s Guide, Ed ition 14 4- 19SpecificationsHardwareSMU Supplemental Characteristics• Current compliance setting accuracy (for opposi

Page 68 - MCSMU - Medium Current SMU

Product Stewardship• Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/ECThis product complies with the WEEE Directive (2002/96/EC) m

Page 69

4- 20 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• Maximum allowable cable resistance (Kelvin connection)For HPSMU, MPSMU, HRSMU: 1

Page 70 - HRSMU - High Resolution SMU

Keysight B1500A User’s Guide, Ed ition 14 4- 21SpecificationsHardware• Overshoot (filter ON)For HPSMU, MPSMU, HRSMUVoltage source: 0.03 % of V rangeCu

Page 71

4- 22 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareMFCMUMFCMU: Multi Frequency Capacitance Measurement Unit• Measurement functions• M

Page 72

Keysight B1500A User’s Guide, Ed ition 14 4- 23SpecificationsHardware• DC bias function•DC biasRange: 0 to ± 25 VResolution: 1 mVAccuracy: ± (0.5 % +

Page 73

4- 24 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• Measurement accuracyMeasurement accuracy at the measurement port of the MFCMU or

Page 74 - MFCMU - Multi Frequency CMU

Keysight B1500A User’s Guide, Ed ition 14 4- 25SpecificationsHardwareTable 4-11 Parameters EPOSC, ZOSCVosc is oscillator level in mV.Table 4-12 Parame

Page 75

4- 26 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-14 Example of calculated C/G measurement accuracyFrequencyMeasured Capacit

Page 76 - 50 7 range

Keysight B1500A User’s Guide, Ed ition 14 4- 27SpecificationsHardwareSCUU/GSWUSCUU: SMU CMU Unify UnitGSWU: Guard Switch UnitThe SCUU multiplexes the

Page 77 - HVSPGU - High Voltage SPGU

4- 28 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• SCUU supplemental characteristics•SMU pathOffset current: < 20 fAOffset volta

Page 78

Keysight B1500A User’s Guide, Ed ition 14 4- 29SpecificationsHardwareAdditional errors (for SMU voltage output accuracy): ± 100 V (open load)• DC bia

Page 79 - 3 Installation

Precautionary StatementKeysight B1500A Semiconductor Device Analyzer operates in the Microsoft Windows environment. Keysight B1500A requires Keysight

Page 80

4- 30 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareHV-SPGUHV-SPGU: High Voltage Semiconductor Pulse Generator Unit• Number of output

Page 81

Keysight B1500A User’s Guide, Ed ition 14 4- 31SpecificationsHardwareTable 4-15 Pulse range and pulse parameterItemValue aa. Unless otherwise stated,

Page 82 - Requirements

4- 32 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-16 Pulse/DC output voltage and accuracy• ALWG (arbitrary linear waveform g

Page 83 - Power Cable

Keysight B1500A User’s Guide, Ed ition 14 4- 33SpecificationsHardware• Programmable timing range: 10 ns to 671.088630 ms, 10 ns resolution• SPGU suppl

Page 84

4- 34 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareSelectorKeysight 16440A (B1500A-A04) SMU/pulse generator selector switches either

Page 85 - Inspection and Installation

Keysight B1500A User’s Guide, Ed ition 14 4- 35SpecificationsHardwareWGFMU/RSUWGFMU: Waveform Generator/Fast Measurement UnitRSU: Remote-sense and Swi

Page 86 - To Perform Initial Setup

4- 36 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareThe V Monitor terminal outputs a buffered signal equal to 1/10 of the Output termi

Page 87

Keysight B1500A User’s Guide, Ed ition 14 4- 37SpecificationsHardware• WGFMU supplemental data•RSU SMU pathLeakage current: < 100 pAResidual resist

Page 88 - To Change GPIB Address

4- 38 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-18 Voltage force accuracy, resolution, and timingV force (Fast IV mode) -5

Page 89 - To Enable System Controller

Keysight B1500A User’s Guide, Ed ition 14 4- 39SpecificationsHardwareTable 4-19 Voltage measurement accuracy, resolution, and noiseTable 4-20 Current

Page 90 - Installing Accessories

Working in ComfortTo optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly

Page 91 - To Set up 16442B (B1500A-A5F)

4- 40 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-22 Minimum timing parameters for current measurement1Voltage applied to DU

Page 92

Keysight B1500A User’s Guide, Ed ition 14 4- 41SpecificationsHardwareTable 4-23 Minimum timing parameters for voltage measurement1Voltage applied to D

Page 93 - To Connect Connector Plate

4- 42 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT SoftwareEasyEXPERT SoftwareOperation mode• Application test modeRealizes applic

Page 94

Keysight B1500A User’s Guide, Ed ition 14 4- 43SpecificationsEasyEXPERT SoftwareOscilloscope viewAvailable for the tracer test using MCSMU modules. Th

Page 95 - To Connect ASU

4- 44 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT SoftwareMeasurement modesSupports the following measurement modes.• IV measurem

Page 96

Keysight B1500A User’s Guide, Ed ition 14 4- 45SpecificationsEasyEXPERT SoftwareStep delay time: 0 to 1 s, 100 s resolutionStep output trigger delay

Page 97 - About ASU output cables

4- 46 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT Software• Current offset cancelThis function subtracts the offset current from

Page 98

Keysight B1500A User’s Guide, Ed ition 14 4- 47SpecificationsEasyEXPERT SoftwareAutomatic analysis functionOn a graphics plot, the markers and lines c

Page 99 - To Connect SCUU/GSWU

4- 48 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT SoftwareWorkspace and data management• WorkspaceSeparate work environment for E

Page 100

Keysight B1500A User’s Guide, Ed ition 14 4- 49SpecificationsProgram and interface capabilitiesProgram and interface capabilities• Data storageHard di

Page 101 - About SCUU output cables

• Maintaining static posture for prolonged periods.• Failing to take frequent short breaks.• Other environmental and psychosocial factors.In addition

Page 102

4- 50 Keysight B1500A User’s Guide, Edition 14SpecificationsDesktop EasyEXPERT SoftwareNOTE For the latest system requirements, go to www.keysight.com

Page 103 - Banana jack

Keysight B1500A User’s Guide, Ed ition 14 4- 51SpecificationsGeneral SpecificationsGeneral Specifications• Temperature rangeOperating: +5 C to +40 C

Page 104

4- 52 Keysight B1500A User’s Guide, Edition 14SpecificationsGeneral Specifications16440A Selector: 250 mm (W)  50 mm (H)  275 mm (D)16445A Selector

Page 106 - Output Panel

5- 2 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsFurnished accessories, available accessories, and available options of Keysight B1

Page 107 - Mounting Connectors

Keysight B1500A User’s Guide, Ed ition 14 5- 3Accessories and OptionsTable 5-2 OptionsOption Item Description B1500A-015 1.5 m length of bundled cabl

Page 108 - 14 11 11 14

5- 4 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsTable 5-3 B1500A-A04 Basic Flash Memory Cell PackageTable 5-4 B1500A-A311 WGFMU Ad

Page 109 - Wiring side

Keysight B1500A User’s Guide, Ed ition 14 5- 5Accessories and OptionsTable 5-5 B1500A-A3P WGFMU Probe Cable KitTable 5-6 B1500A-A5F1 Test Fixture for

Page 110

5- 6 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsTable 5-7 Available AccessoriesModel Number Option Item Description 16440A SMU/PG

Page 111 - Installation

Keysight B1500A User’s Guide, Ed ition 14 5- 7Accessories and Options16445A Selector adapter for 16440A16445A-001 Control cable (B1500 to 16445A), 1.5

Page 112 - To Connect GNDU Output

Notices© Keysight Technologies 2005-2014No part of this manual may be reproduced in any form or by any means (including elec-tronic storage and retrie

Page 113 - To Connect SMU Output

In This Manual This manual describes the product overview and installation information of Keysight Technologies B1500A. This manual consists of the fo

Page 114 - To Minimize Leakage Current

5- 8 Keysight B1500A User’s Guide, Edition 14Accessories and Options16493Q SPGU-SPGU connection cable (SMA to SMA)16493Q-001 8 cm length16493R WGFMU C

Page 115

Keysight B1500A User’s Guide, Ed ition 14 5- 9Accessories and Options16495F Connector plate w/ 12triax., Interlock, GNDU16495F-001 Bulkhead feedthrou

Page 116

5- 10 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsE5288A Atto Sense and Switch Unit (ASU)E5288A-001 Add triaxial and D-sub cables,

Page 118

This information is subject to change without notice. © Keysight Technologies 2005-2014Edition 14, August 2014*B1500-90000*B1500-90000www.keysight.com

Page 119 - To Connect MCSMU Output

ContentsKeysight B1500A User’s Guide, Ed ition 141. Getting StartedTo Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Page 120 - To Connect MFCMU Output

Keysight B1500A User’s Guide, Edition 14ContentsHPSMU - High Power SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Page 121 - Stop key

ContentsKeysight B1500A User’s Guide, Ed ition 14 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Page 122 - Using Test Fixture

Keysight B1500A User’s Guide, Edition 14ContentsDesktop EasyEXPERT Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Page 123 - Substrate

1 Getting Started

Page 124 - To Reduce Leakage Current

1- 2 Keysight B1500A User’s Guide, Edition 14Getting StartedThis chapter describes the basic operations of Keysight B1500A. Before learning the produc

Page 125

Keysight B1500A User’s Guide, Ed ition 14 1- 3Getting StartedTo Turn On/Off B1500ATo Turn On/Off B1500ANOTEWhen turning the B1500A onOpen the measurem

Page 126 - To Measure Low Resistance

1- 4 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Turn On/Off B1500ATo Turn B1500A On1. Connect the power cable from Keysight B1500A to a

Page 127

Keysight B1500A User’s Guide, Ed ition 14 1- 5Getting StartedTo Turn On/Off B1500ANOTE Keysight B1500A has the following front panel user interface.•S

Page 129 - Required Conditions

1- 6 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Launch EasyEXPERTTo Launch EasyEXPERT1. If the automatic start function is off, the Sta

Page 130

Keysight B1500A User’s Guide, Ed ition 14 1- 7Getting StartedTo Launch EasyEXPERTIf Only One Workspace ExistsFor the screen as shown in Figure 1-1, pe

Page 131

1- 8 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Launch EasyEXPERTTo Create WorkspaceFor the screen as shown in Figure 1-2, perform the

Page 132

Keysight B1500A User’s Guide, Ed ition 14 1- 9Getting StartedTo Launch EasyEXPERTTo Select WorkspaceFor the screen as shown in Figure 1-3, perform the

Page 133

1- 10 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Tracer Test ModeTo Use Tracer Test ModeThe following procedure performs the tracer

Page 134 - Triaxial Cable

Keysight B1500A User’s Guide, Ed ition 14 1- 11Getting StartedTo Use Tracer Test ModeTable 1-3 I/V Trace Measurement SetupFigure 1-4 Display Example o

Page 135

1- 12 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Application Test ModeTo Use Application Test ModeFor the screen as shown in Figure

Page 136 - Maintenance

Keysight B1500A User’s Guide, Ed ition 14 1- 13Getting StartedTo Use Application Test ModeTo enter the value, use the USB keyboard or the screen/numer

Page 137 - About Plug-in Modules

1- 14 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Classic Test ModeTo Use Classic Test ModeThe following procedure performs the I/V

Page 138 - To Interconnect SPGUs

Keysight B1500A User’s Guide, Ed ition 14 1- 15Getting StartedTo Use Classic Test ModeSee “To Perform Measurement” on page 1-16 to start measurement.T

Page 140 - About Module Installation

1- 16 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Perform MeasurementTo Perform Measurement1. Click the Single button (upper right on th

Page 141 - 4 Specifications

Keysight B1500A User’s Guide, Ed ition 14 1- 17Getting StartedTo Perform MeasurementTo Use Test Result EditorThe Test Result Editor provides the follo

Page 142

1- 18 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Analysis ToolsTo Use Analysis ToolsThe Data Display window provides several analys

Page 144 - Supported Plug-in Modules

2- 2 Keysight B1500A User’s Guide, Ed ition 14IntroductionThis chapter describes the basic functions and features of Keysight B1500A Semiconductor Dev

Page 145

Keysight B1500A User’s Guide, Ed ition 14 2- 3IntroductionOverviewOverviewKeysight B1500A Semiconductor Device Analyzer is the new generation one box

Page 146 - Maximum Module Configuration

2- 4 Keysight B1500A User’s Guide, Edition 14IntroductionOverview• Keysight B1500A Semiconductor Device AnalyzerMainframe that provides the ground uni

Page 147 - Ground Unit (GNDU)

Keysight B1500A User’s Guide, Ed ition 14 2- 5IntroductionOverview• WGFMU module and RSUWaveform generator/fast measurement unit module and the remote

Page 148 - MPSMU/HRSMU

2- 6 Keysight B1500A User’s Guide, Edition 14IntroductionOverviewKeysight EasyEXPERT SoftwareKeysight EasyEXPERT software is a specially-designed Wind

Page 149 - Hardware

Keysight B1500A User’s Guide, Ed ition 14 2- 7IntroductionOverviewClassic Test You can perform measurements by using the user interface similar to the

Page 150

COMPLIANCE WITH GERMAN NOISE REQUIREMENTSThis is to declare that this product is in conformance with the German Regulation on Noise Declaration for M

Page 151 - Connection path control

2- 8 Keysight B1500A User’s Guide, Edition 14IntroductionFront ViewFront ViewThis section describes the front view of Keysight B1500A.1. Standby switc

Page 152

Keysight B1500A User’s Guide, Ed ition 14 2- 9IntroductionFront View2. HDD access indicatorThis green LED lights in the access status of HDD or DVD dr

Page 153

2- 10 Keysight B1500A User’s Guide, Edition 14IntroductionFront View10. SoftkeysSeven softkeys are available for Keysight EasyEXPERT environment. Used

Page 154

Keysight B1500A User’s Guide, Ed ition 14 2- 11IntroductionRear ViewRear ViewThis section describes the rear view of Keysight B1500A.1. Serial numberY

Page 155

2- 12 Keysight B1500A User’s Guide, Edition 14IntroductionRear View3. LINE input receptacleAC power cable is connected to this receptacle.4. GPIB inte

Page 156

Keysight B1500A User’s Guide, Ed ition 14 2- 13IntroductionRear View10. USB interfacesUSB, 2 ports. For keyboard, mouse, or peripherals.To remove USB

Page 157 - SMU Common Specifications

2- 14 Keysight B1500A User’s Guide, Edition 14IntroductionRear ViewA. GNDU/ADCGround unit and A/D converter module. Always installed in the B1500A.B.

Page 158

Keysight B1500A User’s Guide, Ed ition 14 2- 15IntroductionRear ViewC. WGFMU moduleThe waveform generator/fast measurement unit (WGFMU) has the Ch 1 a

Page 159

2- 16 Keysight B1500A User’s Guide, Edition 14IntroductionRear Viewunder test (DUT). Also the Lcur and Lpot have to be connected together at the other

Page 160

Keysight B1500A User’s Guide, Ed ition 14 2- 17IntroductionMeasurement ModulesMeasurement ModulesKeysight B1500A can be equipped with the following me

Page 161 - ± 1 mV (HPSMU)

Safety SummaryThe following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failur

Page 162

2- 18 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesAbout SMUSource/monitor unit (SMU) can apply DC voltage or current, and c

Page 163

Keysight B1500A User’s Guide, Ed ition 14 2- 19IntroductionMeasurement ModulesHPSMU - High Power SMUThis section describes typical specification of th

Page 164

2- 20 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-1 HPSMU Output Voltage Ranges and Resolutions Table 2-2 HPSMU Out

Page 165

Keysight B1500A User’s Guide, Ed ition 14 2- 21IntroductionMeasurement ModulesTable 2-3 HPSMU Measurement Voltage Values and Resolutions Table 2-4 HPS

Page 166

2- 22 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesMPSMU - Medium Power SMUThis section describes typical specification of t

Page 167 - SCUU/GSWU

Keysight B1500A User’s Guide, Ed ition 14 2- 23IntroductionMeasurement ModulesTable 2-5 MPSMU Output Voltage Ranges and Resolutions Table 2-6 MPSMU Ou

Page 168 - V at 300 sec

2- 24 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-7 MPSMU Measurement Voltage Values and Resolutions Table 2-8 MPSM

Page 169

Keysight B1500A User’s Guide, Ed ition 14 2- 25IntroductionMeasurement ModulesNOTETo connect ASUTo use the ASU, it must be connected to the SMU which

Page 170

2- 26 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesMCSMU - Medium Current SMUThis section describes typical specification of

Page 171

Keysight B1500A User’s Guide, Ed ition 14 2- 27IntroductionMeasurement ModulesTable 2-9 MCSMU Voltage Ranges and ResolutionsTable 2-10 MCSMU Current R

Page 172

• BEFORE APPLYING POWERVerify that all safety precautions are taken. Make all connections to the instrument before applying power. Note the instrumen

Page 173 - Point Time Voltage

2- 28 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesHRSMU - High Resolution SMUThis section describes typical specification o

Page 174 - Selector Adapter

Keysight B1500A User’s Guide, Ed ition 14 2- 29IntroductionMeasurement ModulesTable 2-11 HRSMU Output Voltage Ranges and Resolutions Table 2-12 HRSMU

Page 175 - WGFMU/RSU

2- 30 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-13 HRSMU Measurement Voltage Values and Resolutions Table 2-14 HR

Page 176

Keysight B1500A User’s Guide, Ed ition 14 2- 31IntroductionMeasurement ModulesNOTETo connect ASUTo use the ASU, it must be connected to the SMU which

Page 177

2- 32 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesMFCMU - Multi Frequency CMUThis section describes typical specification o

Page 178

Keysight B1500A User’s Guide, Ed ition 14 2- 33IntroductionMeasurement ModulesTable 2-15 Measurement ParametersPrimary Parameter Secondary ParameterR

Page 179

2- 34 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-16 Measurement Range for Fixed Ranging ModeFigure 2-7 Impedance v

Page 180

Keysight B1500A User’s Guide, Ed ition 14 2- 35IntroductionMeasurement ModulesHVSPGU - High Voltage SPGUThis section describes key specification of th

Page 181

2- 36 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesWGFMU - Waveform Generator/Fast Measurement UnitThis section describes ty

Page 183 - Oscilloscope view

Safety SymbolsThe general definitions of safety symbols used on equipment or in manuals are listed below.Direct current.Alternating current.Earth (gro

Page 184 - Sweep measurement

3- 2 Keysight B1500A User’s Guide, Edition 14InstallationThis chapter describes how to install Keysight B1500A and accessories.• “Requirements”• “Insp

Page 185

Keysight B1500A User’s Guide, Ed ition 14 3- 3InstallationWARNING There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for MPSMU/H

Page 186 - Data display

3- 4 Keysight B1500A User’s Guide, Edition 14InstallationRequirementsRequirements This section contains information on:• “Power Requirements”• “Operat

Page 187 - Arithmetic functions

Keysight B1500A User’s Guide, Ed ition 14 3- 5InstallationRequirementsInstallation Requirements WARNING Do not operate the instrument in dusty environ

Page 188 - External instrument control

3- 6 Keysight B1500A User’s Guide, Edition 14InstallationRequirementsOption 900• Plug: BS 1363/A, 250 V, 10 A• PN: 8120-4420Option 901• Plug: AS/NZS 3

Page 189 - Furnished Software

Keysight B1500A User’s Guide, Ed ition 14 3- 7InstallationInspection and InstallationInspection and InstallationThis section describes what to do when

Page 190 - Desktop EasyEXPERT Software

3- 8 Keysight B1500A User’s Guide, Edition 14InstallationInspection and InstallationTo Perform Initial SetupAfter you receive the instrument, perform

Page 191 - General Specifications

Keysight B1500A User’s Guide, Ed ition 14 3- 9InstallationInspection and InstallationTable 3-1 Users Available Just After the Initial SetupYou can add

Page 192

3- 10 Keysight B1500A User’s Guide, Edition 14InstallationInspection and InstallationTo Change GPIB AddressWhen this instrument is shipped from the fa

Page 193 - 5 Accessories and Options

Keysight B1500A User’s Guide, Ed ition 14 3- 11InstallationInspection and InstallationTo Enable System ControllerTo allow Keysight B1500A/EasyEXPERT t

Page 194

IEC Measurement Category IThe CE mark shows that the product complies with all applicable European Directives.The CSA mark is a registered trademar

Page 195

3- 12 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesInstalling Accessories This section describes how to install the acces

Page 196

Keysight B1500A User’s Guide, Ed ition 14 3- 13InstallationInstalling AccessoriesTo Connect 16442B Test Fixture (B1500A-A5F)See this section if you us

Page 197

3- 14 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTable 3-2 To Connect 16442B (B1500A-A5F)Cables 16442B Terminals B1500A

Page 198

Keysight B1500A User’s Guide, Ed ition 14 3- 15InstallationInstalling AccessoriesTo Connect Connector Plate The available connector plates are listed

Page 199

3- 16 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTable 3-4 To Connect Connector PlateCables Connector PlateB1500A Termi

Page 200

Keysight B1500A User’s Guide, Ed ition 14 3- 17InstallationInstalling AccessoriesTo Connect ASUKeysight E5288A Atto Sense and Switch Unit (ASU) adds t

Page 201

3- 18 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTo install ASU 1. Fix the ASU in the shielding box. The ASU must be fi

Page 202

Keysight B1500A User’s Guide, Ed ition 14 3- 19InstallationInstalling AccessoriesTo connect MFCMU/4284A/ E4980A to AUXPerform the following procedure

Page 203

3- 20 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesFigure 3-2 To Connect ASUFigure 3-3 To Set Shorting BarTo connect othe

Page 204 - *B1500-90000*

Keysight B1500A User’s Guide, Ed ition 14 3- 21InstallationInstalling AccessoriesTo Connect SCUU/GSWUKeysight N1301A-100 SMU CMU Unify Unit (SCUU) is

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