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Measuring, testing & control
B1500A
User's Guide
Agilent Technologies B1500A User's Guide Page 4
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Keysight Technologies B1500A
1
Semiconductor Device Analyzer
1
Safety Summary
6
Safety Symbols
8
Circuit Common
11
Product Stewardship
16
Precautionary Statement
17
Working in Comfort
18
In This Manual
20
Contents
21
1 Getting Started
25
+ agb1500a
27
+ UsbDevice1
27
To Turn B1500A On
28
To Turn B1500A Off
28
To Launch EasyEXPERT
30
If Only One Workspace Exists
31
To Create Workspace
32
To Select Workspace
33
To Use Tracer Test Mode
34
To Use Application Test Mode
36
Test Definitions
37
To Use Classic Test Mode
38
To Perform Measurement
40
To Use Test Result Editor
41
To Use Analysis Tools
42
2Introduction
43
Application Library
44
Overview
45
Keysight EasyEXPERT Software
48
Front View
50
Rear View
53
Measurement Modules
59
About SMU
60
HPSMU - High Power SMU
61
MPSMU - Medium Power SMU
64
To connect ASU
67
Before using 1 pA range
67
MCSMU - Medium Current SMU
68
HRSMU - High Resolution SMU
70
MFCMU - Multi Frequency CMU
74
300 k7 range
76
50 7 range
76
HVSPGU - High Voltage SPGU
77
3 Installation
79
Requirements
82
Installation Requirements
83
Power Cable
83
Inspection and Installation
85
To Perform Initial Setup
86
To Change GPIB Address
88
To Enable System Controller
89
Installing Accessories
90
To Set up 16442B (B1500A-A5F)
91
To Connect Connector Plate
93
To Connect ASU
95
About ASU output cables
97
To Connect SCUU/GSWU
99
About SCUU output cables
101
Connector handle
103
Banana jack
103
Selection switch SW2 and SW4
105
Input Panel
106
Output Panel
106
Mounting Connectors
107
2 − 11.3 3.2 2 − M3 x 0.5
108
14 11 11 14
108
Connector side
109
Interlock switch
109
Wiring side
109
Installation
111
To Connect GNDU Output
112
To Connect SMU Output
113
To Minimize Leakage Current
114
To Connect MCSMU Output
119
To Connect MFCMU Output
120
Stop key
121
Using Test Fixture
122
SMU(±200V= 1A Max)
123
Substrate
123
To Reduce Leakage Current
124
To Measure Low Resistance
126
Switching Matrix
128
Required Conditions
129
FORCE or SENSE (A)
134
FORCE or SENSE (B)
134
Insulator
134
Triaxial Cable
134
Maintenance
136
About Plug-in Modules
137
To Interconnect SPGUs
138
To Interconnect WGFMUs
139
About Module Installation
140
4 Specifications
141
Specification Conditions
143
Supported Plug-in Modules
144
Maximum Module Configuration
146
Ground Unit (GNDU)
147
MPSMU/HRSMU
148
Specifications
149
Hardware
149
Connect ASU to dedicated SMU
151
Connection path control
151
SMU Common Specifications
157
± 1 mV (HPSMU)
161
SCUU/GSWU
167
V at 300 sec
168
Point Time Voltage
173
Selector
174
Selector Adapter
174
WGFMU/RSU
175
Operation mode
182
Application library
182
Oscilloscope view
183
Measurement modes
184
Sweep measurement
184
Data display
186
Automatic analysis function
187
Arithmetic functions
187
Workspace and data management
188
External instrument control
188
Furnished Software
189
Desktop EasyEXPERT Software
190
General Specifications
191
5 Accessories and Options
193
*B1500-90000*
204
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