Agilent Technologies B1500A User's Guide Page 150
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4- 10 Keysight B1500A User’s Guide, Edition 14
Specifications
Hardware
Table 4-3 Voltage range, resolution, and accuracy (high speed ADC)
Table 4-4 Current range, resolution, and accuracy (high speed ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy
±(%+mV)
a
a. ±(% of output/measured value + offset value in mV)
Measurement accuracy
±(%+mV)
a
Maximum
current
±0.5 V 25 V25 V ±(0.018 + 0.15) ±(0.01 + 0.25) 100 mA
±2 V 100 V100 V ±(0.018 + 0.4) ±(0.01 + 0.7) 100 mA
±5 V 250 V250 V ±(0.018 + 0.75) ±(0.01 + 2) 100 mA
±20 V 1 mV 1 mV ±(0.018 + 3) ±(0.01 + 4) 100 mA
±40 V 2 mV 2 mV ±(0.018 + 6) ±(0.015 + 8)
b
b. 100 mA (Vo 20 V), 50 mA (20 V < Vo 40 V), 20 mA (40 V < Vo), Vo is the output voltage.
±100 V 5 mV 5 mV ±(0.018 + 15) ±(0.02 + 20)
Range
Force
resolution
Measurement
resolution
Force accuracy ±(%+A+A)
a
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
Measurement accuracy
±(%+A+A)
a
Maximum
voltage
±1 pA
b
b. Applicable if Keysight E5288A Atto Sense and Switch Unit (ASU) is used.
1 fA 0.1 fA ±(0.9+15E-15) ±(1.8+12E-15) 100 V
±10 pA
c
c. Not applicable for the MPSMU without ASU.
5 fA 1 fA ±(0.46+3E-14+VoE-17) ±(0.5+15E-15+Vo1E-17) 100 V
±100 pA
c
5 fA 5 fA ±(0.3+1E-13+VoE-16) ±(0.5+4E-14+Vo1E-16) 100 V
±1 nA 50 fA 50 fA ±(0.1+3E-13+Vo1E-15) ±(0.25+3E-13+Vo1E-15) 100 V
±10 nA 500 fA 500 fA ±(0.1+3E-12+Vo1E-14) ±(0.25+2E-12+Vo1E-14) 100 V
±100 nA 5 pA 5 pA ±(0.05+3E-11+Vo1E-13) ±(0.1+2E-11+Vo1E-13) 100 V
±1 A 50 pA 50 pA ±(0.05+3E-10+Vo1E-12) ±(0.1+2E-10+Vo1E-12) 100 V
±10 A 500 pA 500 pA ±(0.05+3E-9+Vo1E-11) ±(0.05+2E-9+Vo1E-11) 100 V
±100 A 5 nA 5 nA ±(0.035+15E-9+Vo1E-10) ±(0.05+2E-8+Vo1E-10) 100 V
±1 mA 50 nA 50 nA ±(0.04+15E-8+Vo1E-9) ±(0.04+2E-7+Vo1E-9) 100 V
±10 mA 500 nA 500 nA ±(0.04+15E-7+Vo1E-8) ±(0.04+2E-6+Vo1E-8) 100 V
±100 mA 5 A5 A ±(0.045+15E-6+Vo1E-7) ±(0.1+2E-5+Vo1E-7)
d
d. 100 V (Io 20 mA), 40 V (20 mA < Io 50 mA), 20 V (50 mA < Io), Io is the output current.
- Keysight Technologies B1500A 1
- Semiconductor Device Analyzer 1
- Safety Summary 6
- Safety Symbols 8
- Circuit Common 11
- Product Stewardship 16
- Precautionary Statement 17
- Working in Comfort 18
- In This Manual 20
- Contents 21
- 1 Getting Started 25
- + agb1500a 27
- + UsbDevice1 27
- To Turn B1500A On 28
- To Turn B1500A Off 28
- To Launch EasyEXPERT 30
- If Only One Workspace Exists 31
- To Create Workspace 32
- To Select Workspace 33
- To Use Tracer Test Mode 34
- To Use Application Test Mode 36
- Test Definitions 37
- To Use Classic Test Mode 38
- To Perform Measurement 40
- To Use Test Result Editor 41
- To Use Analysis Tools 42
- 2Introduction 43
- Application Library 44
- Overview 45
- Keysight EasyEXPERT Software 48
- Front View 50
- Rear View 53
- Measurement Modules 59
- About SMU 60
- HPSMU - High Power SMU 61
- MPSMU - Medium Power SMU 64
- To connect ASU 67
- Before using 1 pA range 67
- MCSMU - Medium Current SMU 68
- HRSMU - High Resolution SMU 70
- MFCMU - Multi Frequency CMU 74
- 300 k7 range 76
- 50 7 range 76
- HVSPGU - High Voltage SPGU 77
- 3 Installation 79
- Requirements 82
- Installation Requirements 83
- Power Cable 83
- Inspection and Installation 85
- To Perform Initial Setup 86
- To Change GPIB Address 88
- To Enable System Controller 89
- Installing Accessories 90
- To Set up 16442B (B1500A-A5F) 91
- To Connect Connector Plate 93
- To Connect ASU 95
- About ASU output cables 97
- To Connect SCUU/GSWU 99
- About SCUU output cables 101
- Connector handle 103
- Banana jack 103
- Selection switch SW2 and SW4 105
- Input Panel 106
- Output Panel 106
- Mounting Connectors 107
- 2 − 11.3 3.2 2 − M3 x 0.5 108
- 14 11 11 14 108
- Connector side 109
- Interlock switch 109
- Wiring side 109
- Installation 111
- To Connect GNDU Output 112
- To Connect SMU Output 113
- To Minimize Leakage Current 114
- To Connect MCSMU Output 119
- To Connect MFCMU Output 120
- Stop key 121
- Using Test Fixture 122
- SMU(±200V= 1A Max) 123
- Substrate 123
- To Reduce Leakage Current 124
- To Measure Low Resistance 126
- Switching Matrix 128
- Required Conditions 129
- FORCE or SENSE (A) 134
- FORCE or SENSE (B) 134
- Insulator 134
- Triaxial Cable 134
- Maintenance 136
- About Plug-in Modules 137
- To Interconnect SPGUs 138
- To Interconnect WGFMUs 139
- About Module Installation 140
- 4 Specifications 141
- Specification Conditions 143
- Supported Plug-in Modules 144
- Maximum Module Configuration 146
- Ground Unit (GNDU) 147
- MPSMU/HRSMU 148
- Specifications 149
- Hardware 149
- Connect ASU to dedicated SMU 151
- Connection path control 151
- SMU Common Specifications 157
- ± 1 mV (HPSMU) 161
- SCUU/GSWU 167
- V at 300 sec 168
- Point Time Voltage 173
- Selector 174
- Selector Adapter 174
- WGFMU/RSU 175
- Operation mode 182
- Application library 182
- Oscilloscope view 183
- Measurement modes 184
- Sweep measurement 184
- Data display 186
- Automatic analysis function 187
- Arithmetic functions 187
- Workspace and data management 188
- External instrument control 188
- Furnished Software 189
- Desktop EasyEXPERT Software 190
- General Specifications 191
- 5 Accessories and Options 193
- *B1500-90000* 204
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