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Introduction
Overview
• Keysight B1500A Semiconductor Device Analyzer
Mainframe that provides the ground unit (GNDU) and ten empty slots for the
measurement facilities, and Keysight EasyEXPERT software for the operating
environment. The EasyEXPERT is the GUI based measurement control and
analysis software runs on the Windows.
This instrument is equipped with the 15 inch LCD with touch panel, hard disk
drive, DVD drive, and USB/LAN/GP-IB interfaces. This instrument is also
furnished the USB keyboard, the USB mouse, and the stylus pen.
• HRSMU module
High resolution source/monitor unit module. Occupies one slot. Needs Keysight
E5288A ASU to perform atto level current measurement or automatic switching
of the measurement resource connected to the device under test (DUT).
• HPSMU module
High power source/monitor unit module. Occupies two slots.
• MPSMU module
Medium power source/monitor unit module. Occupies one slot. Needs Keysight
E5288A ASU to perform atto level current measurement or automatic switching
of the measurement resource connected to the device under test (DUT). ASU is
effective for the B1511B MPSMU. ASU cannot be connected to the B1511A
MPSMU.
•MCSMU module
Medium current source/monitor unit module. Occupies one slot.
•MFCMU module
Multi frequency capacitance measurement unit module. Occupies one slot.
Needs Keysight N1301A-100 SCUU to perform automatic switching of the
measurement resource connected to the DUT.
• SPGU module
High voltage semiconductor pulse generator unit module. Occupies one slot. Up
to five modules can be installed in one mainframe. One module provides two
output channels. Needs Keysight 16440A (B1500A-A04) and 16445A to
perform automatic switching of the measurement resource connected to the
DUT.
- Keysight Technologies B1500A 1
- Semiconductor Device Analyzer 1
- Safety Summary 6
- Safety Symbols 8
- Circuit Common 11
- Product Stewardship 16
- Precautionary Statement 17
- Working in Comfort 18
- In This Manual 20
- Contents 21
- 1 Getting Started 25
- + agb1500a 27
- + UsbDevice1 27
- To Turn B1500A On 28
- To Turn B1500A Off 28
- To Launch EasyEXPERT 30
- If Only One Workspace Exists 31
- To Create Workspace 32
- To Select Workspace 33
- To Use Tracer Test Mode 34
- To Use Application Test Mode 36
- Test Definitions 37
- To Use Classic Test Mode 38
- To Perform Measurement 40
- To Use Test Result Editor 41
- To Use Analysis Tools 42
- 2Introduction 43
- Application Library 44
- Overview 45
- Keysight EasyEXPERT Software 48
- Front View 50
- Rear View 53
- Measurement Modules 59
- About SMU 60
- HPSMU - High Power SMU 61
- MPSMU - Medium Power SMU 64
- To connect ASU 67
- Before using 1 pA range 67
- MCSMU - Medium Current SMU 68
- HRSMU - High Resolution SMU 70
- MFCMU - Multi Frequency CMU 74
- 300 k7 range 76
- 50 7 range 76
- HVSPGU - High Voltage SPGU 77
- 3 Installation 79
- Requirements 82
- Installation Requirements 83
- Power Cable 83
- Inspection and Installation 85
- To Perform Initial Setup 86
- To Change GPIB Address 88
- To Enable System Controller 89
- Installing Accessories 90
- To Set up 16442B (B1500A-A5F) 91
- To Connect Connector Plate 93
- To Connect ASU 95
- About ASU output cables 97
- To Connect SCUU/GSWU 99
- About SCUU output cables 101
- Connector handle 103
- Banana jack 103
- Selection switch SW2 and SW4 105
- Input Panel 106
- Output Panel 106
- Mounting Connectors 107
- 2 − 11.3 3.2 2 − M3 x 0.5 108
- 14 11 11 14 108
- Connector side 109
- Interlock switch 109
- Wiring side 109
- Installation 111
- To Connect GNDU Output 112
- To Connect SMU Output 113
- To Minimize Leakage Current 114
- To Connect MCSMU Output 119
- To Connect MFCMU Output 120
- Stop key 121
- Using Test Fixture 122
- SMU(±200V= 1A Max) 123
- Substrate 123
- To Reduce Leakage Current 124
- To Measure Low Resistance 126
- Switching Matrix 128
- Required Conditions 129
- FORCE or SENSE (A) 134
- FORCE or SENSE (B) 134
- Insulator 134
- Triaxial Cable 134
- Maintenance 136
- About Plug-in Modules 137
- To Interconnect SPGUs 138
- To Interconnect WGFMUs 139
- About Module Installation 140
- 4 Specifications 141
- Specification Conditions 143
- Supported Plug-in Modules 144
- Maximum Module Configuration 146
- Ground Unit (GNDU) 147
- MPSMU/HRSMU 148
- Specifications 149
- Hardware 149
- Connect ASU to dedicated SMU 151
- Connection path control 151
- SMU Common Specifications 157
- ± 1 mV (HPSMU) 161
- SCUU/GSWU 167
- V at 300 sec 168
- Point Time Voltage 173
- Selector 174
- Selector Adapter 174
- WGFMU/RSU 175
- Operation mode 182
- Application library 182
- Oscilloscope view 183
- Measurement modes 184
- Sweep measurement 184
- Data display 186
- Automatic analysis function 187
- Arithmetic functions 187
- Workspace and data management 188
- External instrument control 188
- Furnished Software 189
- Desktop EasyEXPERT Software 190
- General Specifications 191
- 5 Accessories and Options 193
- *B1500-90000* 204
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