Agilent Technologies E5500 Series User's Guide download pdf (Page 146)

Scanner Maintenance and Calibration 8

Agilent 5500 SPM User’s Guide 146

After updating, re-scan the calibration target. The spacing between

features should be approximately the same across the scan range.

X Hysteresis

Place a vertical cursor at the same location in the Trace and Retrace

images. The cursor should cross the same features in both images. If this

is not the case, as in Figure 98, increase the X Hysteresis value and

re-scan. Alignment should be consistent across the full range of the

x-axis. Several iterations may be necessary to align all edges in the trace

and retrace images.

Figure 98 Mi

salignment between trace and retrace

Figure 99 Features align properly after X Hysteresis adjustment

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Agilent Technologies E5500 Series User's Guide Page 146