Agilent Technologies E5500 Series User's Guide download pdf (Page 150)

Scanner Maintenance and Calibration 8

Agilent 5500 SPM User’s Guide 150

on the edge of a feature while the scan was moving upwards. The red

marker was placed on the same feature during the downward scan.

Figure 103 Markers indicating trace and re-trace Y hysteresis

While scanning in one direction, focus on one step of the grating. As the

scan data is plotted position a marker on this edge. Wait for the scan in

the opposite direction to occur and position a second marker on the

same edge after the plot has been updated. In the example below, about

2 microns of hysteresis can be measured using this method.

After increasing or decreasing the Y Hysteresis term, alignment of the

individual edges should be confirmed across the full range of the Y axis.

It may be necessary to update the hysteresis term more than once before

all edges become aligned in both the upward and downward scans.

Y Sensitivity

Using the Vertical Cross-section tool, measure the top-to-bottom

distance of a set of features across the scan (Figure 104).

Figure 104 Cross-section of several features to check Y sensitivity

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Agilent Technologies E5500 Series User's Guide Page 150