Agilent Technologies B1500A Service Manual

Agilent Technologies Agilent B1500A Semiconductor Device AnalyzerSelf-paced Training Manual

Required Devices for Class ExercisesTo perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the follo

Module 6Low Current Measurement6-28Maximum resolution16 PLCGummel PlotRange and Integration TimeMedium integration smoothes the plot at the ultra low

Module 6Low Current Measurement6-29LOW CURRENT MEASUREMENTGummel PlotThis curve shows a normal gummel characteristic of the bipolar transistor. The c

Module 6Low Current Measurement6-30Fix by isolating base-collector leadsFix by using ferritebead on base leadGummel Plot With Base-Collector Self Osci

Module 6Low Current Measurement6-31ULTRA LOW CURRENTSubthreshold CurveThis curve shows the high quality measurement that you would typically expect wi

Module 6Low Current Measurement6-32Small STEP: 100 mVLarge HOLD TIME: 3 secULTRA LOW CURRENTMeasurement SetupTo prevent charging current due to residu

Module 6Low Current Measurement6-33Not part of the subthreshold characteristicULTRA LOW CURRENTEffect of Cable Charging CurrentYou can see an initial

Module 6Low Current Measurement6-34Lowest resolution: Auto or Limited 10 pA Set long integration timeULTRA LOW CURRENTRange and In

Module 6Low Current Measurement6-35z Leakage to fA levelsz Electrical connection to wafer backsidez Chuck must be guardedGateSubstrateWafer backsideOx

Module 6Low Current Measurement6-36Low Current Gate Oxide MeasurementFowler-Nordheim (FN) PlotThe Fowler-Nordheim (FN) plot is a log plot of oxide lea

Module 6Low Current Measurement6-37Negative sweep.Accumulation mode.Wait for 5 V initial stepFOWLER-NORDHEIM PLOTMeasurement PageA 3 second delay at t

Required Accessories for Class ExercisesTo perform the class exercises, you need the following accessories. Prepare the accessories shown below.Design

Module 6Low Current Measurement6-38Gate Oxide CapacitorChuck GuardSMU1SMU2Chuck10^13 ohms10^13 ohmsShielding Box (Ground)Low Current Gate Oxide Meas.U

To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories.To perform the flash memory class e

ContentsContents-1Module 1. Introduction• New Features• EasyEXPERT• To Perform Easy Application Test• User Interface• Modular Mainframe• SCUU/GSWU• AS

ContentsContents-2Module 3. Data Display and Management• Data Display window• Graph Analysis Tools• Data Status• To Change Graph/List/Display Setup• T

ContentsContents-3Module 5. Basic Measurement• SMU Fundamentals• Classic Test Environment• SMUs Connected in Series or Parallel• Cabling and Fixture I

ContentsContents-4Module 7. Measurement Functions• SMU Pulsed Sweep Measurement• I/V-t Sampling Measurement• Negative Hold Time for High Speed Samplin

ContentsContents-5Module 9. Modifying Application Test Definitions• To Open Application Test Definition • To Modify Test Definition • To Use Debug Too

ContentsContents-6Module 11. Advanced Definitions and Operations• To Control External GPIB Devices• To Call Execution Files• To Perform Repeat Measure

ContentsContents-7Module 13. SPGU Control and Applications• High Voltage SPGU• SPGU Control• Pulse Generator Mode• Charge Pumping• Flash Memory Test•

Notices© Agilent Technologies 2005 - 2008No part of this manual may be reproduced in any form or by any means (including electronic storage and retrie

ContentsContents-8

5 Basic Measurement

Module 5Basic Measurement5-2In This Module• SMU Fundamentals• Classic Test Environment• SMUs Connected in Series or Parallel• Cabling and Fixture Issu

Module 5Basic Measurement5-3Output SwitchV Source ModeSMUFORCECOMMONI Source ModeCommon ModeAV+-SMU Block DiagramThree ModesThe source monitor unit (

Module 5Basic Measurement5-4Single Sweep Double SweepLinear SweepLog SweepBasic Sweep MeasurementVAR1The SMUs can now sweep up to a value and then bac

Module 5Basic Measurement5-5Subordinate sweepSynchronoussweepVAR1 (primary sweep)VAR2(secondary sweep)VAR1 (primary sweep)VAR1’ (synchronous sweep)Swe

Module 5Basic Measurement5-6z Four terminal MOS devicez Only one configuration requiredz Speed up testing SourceGateDrainSubstrateConstantCommonVAR1VA

Module 5Basic Measurement5-7MOS Id vs Vd Basic Measurementz You will connect the SMU cables and jumper leadsz You will then "properly" inser

Module 5Basic Measurement5-8Force Lines to Fixture 1,2,3,4 Ports16442A/B FixtureB1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUForce sideSense sideSMU Triax C

Module 5Basic Measurement5-9If you use the Sense lines …Curves clamped at 10 mA levelB1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUWrong Triaxial HookupThis

Module 5Basic Measurement5-10123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU1: Substrate2: Source

Module 5Basic Measurement5-111. Prepare the Agilent B1500A Manual CD-ROM Edition 4 or later2. Insert the CD-ROM into the B1500A built-in CD-ROM drive3

Module 5Basic Measurement5-121. Highlight IDVD in My Favorite Setup2. Click Recall buttonTo Get Classic Test Setup:1. Highlight Id-Vd in My Favorite S

Module 5Basic Measurement5-13Classic Test – Channel SetupAfter you get the IDVD setup data, you will see the Classic Test setup screen as shown.The Ch

Module 5Basic Measurement5-14Do not abort oncompliance,oscillation, etc.Classic Test – Measurement SetupThe Measurement Setup screen is shown here. T

Module 5Basic Measurement5-15Classic Test – Display SetupThe Display Setup screen allows you to set the X-Y graph axes. The display setup is divorced

Module 5Basic Measurement5-161. Click Single buttonThis opens the Data Display window and starts measurement.The Data Display window shows measurement

Module 5Basic Measurement5-17Graph PlotAnalysis toolsAuto ScaleList DisplayParametersData Display Window – Graph This window displays measurement resu

Module 5Basic Measurement5-18Marker positionGraph PlotList DisplayParametersData Display Window - List Analysis toolsThe List Display corresponds exac

Module 5Basic Measurement5-19Paste to NotepadOpen by a spreadsheet softwareTo Copy List Data

In This ManualThis document is the self-paced training manual to help you to understand what is Agilent B1500A, what functions the B1500A has, how to

Module 5Basic Measurement5-20Application TestRecall Id-Vd application test setup data.After you get the Id-Vd setup data, you will see the Application

Module 5Basic Measurement5-21Clicking the Extended Setup button opens …Application Test – Extended SetupThe Extended Setup dialog box allows the user

Module 5Basic Measurement5-22In Series or Parallelz To Double the Output Voltagez from 100 V to 200 V for HRSMU and MPSMUz from 200 V to 400 V for HPS

Module 5Basic Measurement5-23Two SMUs in SeriesVAR1VAR1'SMU1V=0 to 100SMU2V=0 to -100200 V Resistor SweepBaseCollectorConst.EmitterVAR1'VAR1

Module 5Basic Measurement5-24Two SMUs in SeriesVoltage across resistorVR = V1-V2Channel and User Function PagesThe voltage across the resistor (VR) is

Module 5Basic Measurement5-25Two SMUs in SeriesVAR1' Ratio = -1Measurement and Display PagesThe VAR1’ mode is used to synchronously sweep two SMU

Module 5Basic Measurement5-26Two SMUs in SeriesUse the interlockcable and observesafety precautions.511KResistorWARNINGGraphics Page 0 to 200 V Th

Module 5Basic Measurement5-27Two SMUs in ParallelSMU1V=0 to 0.2VAR1VAR1’V1V2Ground Unit (GNDU) orChassis GndSMU2V=0 to 0.21 ohmUse Ground Unit or the

Module 5Basic Measurement5-28Two SMUs in ParallelCurrent in resistorItotal = I1+I2Channel and User Function PagesA user function totals the current in

Module 5Basic Measurement5-29Two SMUs in ParallelVAR1' Ratio = 1Measurement and Display Pages The VAR1’ mode with Ratio = 1 forces two SMUs to sw

• Module 11. Advanced Definitions and OperationsThis module explains how to control external GPIB devices, how to call an execution file, how to perfo

Module 5Basic Measurement5-30Two SMUs in Parallel1 ohmResistorGraphics Page 0 to 200 mAThe result is a clean sweep to 200 mV. It shows the curren

Module 5Basic Measurement5-31z Guard connectionz Kelvin connectionz Prober interfacez Triaxial Probesz RF Fixturing interfacez Feedthru and triax to c

Module 5Basic Measurement5-32Simplified Diagramx1BufferSMUDUTForceVGuardRs10KGuard Connection for Non-Kelvin ConnectionThe guard connection is needed

Module 5Basic Measurement5-33Shield (Ground)GuardForce16494A-001(1.5 m)16494A-002(3.0 m)Shield Capacitance 900 pF 1800 pFGuard Capacitance 130 pF 240

Module 5Basic Measurement5-34Shield (Ground)GuardForceShield (Ground)ForceVg Coax CablesVg Triax CablesMOSFET SubthresholdMOSFET Subthres

Module 5Basic Measurement5-35Simplified Diagramx1BufferSMUGuardSenseDUTForceVRs10KGuard Connection for Kelvin connectionWith the Kelvin connection, se

Module 5Basic Measurement5-36GuardForceGroundSenseKelvin Triaxial CableThe triaxial cables are good for low current measurements. However, two cables

Module 5Basic Measurement5-37IBRe = 735 mΩ Rcable = 214 mΩVCmonitorSlope = 1/Re(Kelvin) Slope = 1/(Re+Rcable)(Non-Kelvin) Ib (mA)Vc (mV)050200.1Why Ke

Module 5Basic Measurement5-38Bipolar Re Using A Kelvin SMUz You will connect a Kelvin triax cable to the B1500A z You will then connect jumper leads a

Module 5Basic Measurement5-39z Triax to SMUs 1 and 2z Kelvin Triax to SMU 316442A/B FixtureB1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUCable ConnectionsThi

Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the

Module 5Basic Measurement5-40123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGUE B CBEC17: Emitter16

Module 5Basic Measurement5-411. Highlight REKELV in My Favorite Setup2. Click Recall buttonTo Get REKELV Test Setup:To Get Setup Data

Module 5Basic Measurement5-42Click button to start measurementSingle Kelvin MeasurementClick the Single button to make a new measurem

Module 5Basic Measurement5-43You can switchthe analysis linebetween the twocurves with this softkeyClick button to start append measurementN

Module 5Basic Measurement5-44To Kelvin ProbeTo Guarded ChuckProber Kelvin Cable ConnectionPhoto of SMU cable connection to a Cascade Microtech Summit

Module 5Basic Measurement5-45Non-Kelvin ConnectionJumper to eliminate cableresistance in force lineInsulatorCOMMONFORCESENSEShielding BoxConnector Pla

Module 5Basic Measurement5-46z Use single triax for basic MOS FET measurementsz One triax on each Force line z Leave the Sense lines open...no cable c

Module 5Basic Measurement5-47Guarded to within 2mm of tipSingle Triax Kelvin TriaxTriaxial ProbesThese probes are guarded within 2mm of the probe tip,

Module 5Basic Measurement5-48z Triax is not necessary...bias currents are > 1 nA.Use triax to coax adapters with floating guard.RF in Bias NetworkB

Module 5Basic Measurement5-49z For measurements above 42 Voltsz For program control using program memoryView from B1500A rear panel123456Short require

NOTE Demo.xpg fileDemo.xpg file is required to create the Demo preset group which contains the test setup data used by the class exercises. And it is

Module 5Basic Measurement5-5016493J-001 1.5 m cable16493J-002 3.0 m cable16442A/B Fixtureinterlock cableThe 16493J interlock cable is designed to be c

Module 5Basic Measurement5-51Use the 16058A with the B1500A 4 non-Kelvin SMU inputs3 general purpose coaxial inputsAdd the 16493A Adapter CableInterlo

Module 5Basic Measurement5-52

6 Low Current Measurement

Module 6Low Current Measurement6-2In This Module• Low-Current Measurement Challenges• Calibration and Zero Cancel• Effect of Cable Movement• ASU for U

Module 6Low Current Measurement6-3z Measurements below 10 fA at the wafer levelz Repeatability within a few fA z Speeds less than 1 minute for subthre

Module 6Low Current Measurement6-4z NOISE FROM PROBERz Faraday enclosure requiredz Eliminate all electrical interferencez STRAY CAPACITANCEz Full guar

Module 6Low Current Measurement6-59 Low loss triaxial connection (no matrix card)9 Guard to tip of probe (no bare needle or probe cards)9 No air flowi

Module 6Low Current Measurement6-6z Sweep 0 to 1 volt with no cables attached to SMUz Check that there is a +/-3 fA base line z Add prober cables but

Module 6Low Current Measurement6-7z WAIT 30 MINUTES AFTER TURN ONz Instrument must stabilizez CAL & ZERO WITH PROBES UPz Prevent device damagez ZE

Test Setup for Class ExercisesThe Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The f

Module 6Low Current Measurement6-8CalibrationLow CurrentCalibration & Zero CancelClick Calibration button to open the Calibration window.SMU calib

Module 6Low Current Measurement6-9To Get Started:z Use the next several pages as your guidez Remove any cable attached to SMU4z Measure SMU4 noise lev

Module 6Low Current Measurement6-10+/- 3 fA variation typical, using 16 PLC integration timeCursor at the maximum point 3.17 fAMarker at the minimum p

Module 6Low Current Measurement6-11Delete SMU1 and SMU2Change Mode to V andFunction to VAR1ZERO CHECKChannel SetupClick the Classic Test tab, I/V Swee

Module 6Low Current Measurement6-12Do not change this screenZERO CHECKMeasurement SetupThis default sweep setup is enough for the Zero Check measureme

Module 6Low Current Measurement6-13Change SMU Range toAUTO or LIMITED 10 pAChange Integration Time to16 PLCZERO CHECKRange and Integration TimeYou mus

Module 6Low Current Measurement6-14Linear, with zero set to mid scaleZERO CHECKDisplay SetupThe best check is done with a LINEAR scale which brackets

Module 6Low Current Measurement6-15Approx. 50 sec< +/- 3 fA< +/- 3 fA> +/- 3 fAZERO CHECKEffect of connecting a triaxial cableIf you change a

Module 6Low Current Measurement6-16Bumping cableBending CableZERO CHECKEffect of cable movementAs you can see, your fixturing must be free from vibrat

Module 6Low Current Measurement6-17Control cable(control signal and Sense signal)ForceSense (optional)Triax cableFrom HRSMUForceD-subFor Ultra Low Cur

Trng List MOSFET Vth-gmmax measurement using I/V List SweepTrng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)Trng Sampling 0.1 μF samplin

Module 6Low Current Measurement6-18ConfigurationZERO CHECKAppendix: Using ASUYou can check whether the ASU connection is correct or wrong. Open the C

Module 6Low Current Measurement6-19HRSMU+ASUHRSMUZERO CHECKAppendix: Using ASUThis slide shows the open measurement results with ASU and without ASU.T

Module 6Low Current Measurement6-20You will:z Check low level accuracy with fixture lid open/closedz Observe trade off between resolution and speedz C

Module 6Low Current Measurement6-21123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU1: Substrate2:

Module 6Low Current Measurement6-22Class ExerciseSD214DE MOS SubthresholdWith lid closed, you should see this typical response using the IDVG setup da

Module 6Low Current Measurement6-23Change LIMITED range from 10 pA to 100 nA. Change Factor from 16 to 1. Change Mode from PLC to AUTO to NORMAL.Clas

Module 6Low Current Measurement6-24z Ve is swept while Vb and Vc are held at 0 Vz Ib and Ic are plotted on log scaleBaseCollectorSMU3ConstantEmitterVA

Module 6Low Current Measurement6-25z You will notice that sub 10 fA measurements are possiblez Set the jumper leads for the bipolar transistorz Insert

Module 6Low Current Measurement6-26BEC123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGUE B C17: Emi

Module 6Low Current Measurement6-27Small step size.Negative sweep values.Gummel PlotMeasurement SetupVe is swept below ground level to keep positive b