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Measuring, testing & control
B1500A
Service Manual
Agilent Technologies B1500A Service Manual Page 64
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Module 5
Basic Measurement
5-44
To Kelvi
n Probe
To Guarde
d Chuck
Prober Kelvin Cable Connection
Photo
of SMU cable connection
to a Cascade Microtech Sum
mit probe stat
ion.
The Kelvin triaxial cab
les mate directl
y to the probe station.
1
2
...
59
60
61
62
63
64
65
66
67
68
69
...
109
110
Agilent B1500A
1
Semiconductor Device
1
Analyzer
1
Manual Part Number
2
Warranty
2
Technology Licenses
2
Restricted Rights Legend
2
In This Manual
4
Class Exercises
6
.xtr files
7
Demo.xpg file
7
.xtd files
7
1 ohm Resistor
10
1.1 kohm Resistor
10
511 kohm Resistor
10
0.1 uF Capacitor
10
Module 1. Introduction
13
Module 2. Getting Started
13
Module 5. Basic Measurement
15
Contents
20
Contents-8
20
5 Basic Measurement
21
In This Module
22
SMU Block Diagram
23
Basic Sweep Measurement
24
Sweep Measurement Modes
25
Combining VAR1, VAR1’, VAR2
25
Why Four SMUs?
26
Class Exercise
27
SMU Triax Connection
28
Wrong Triaxial Hookup
29
Jumper Leads – MOS transistor
30
To Import Demo Data
31
To Get Setup Data
32
Classic Test – Channel Setup
33
Do not abort on
34
Classic Test – Display Setup
35
To Start Measurement
36
Data Display Window – Graph
37
Data Display Window - List
38
Paste to Notepad
39
To Copy List Data
39
Application Test
40
Module 5
41
Basic Measurement
41
SMUs May Be Connected
42
200 V Resistor Sweep
43
200 V BVceo
43
Two SMUs in Series
44
Voltage across resistor
44
VR = V1-V2
44
VAR1' Ratio = -1
45
Measurement and Display Pages
45
Graphics Page 0 to 200 V
46
200 mA Output
47
Two SMUs in Parallel
48
Current in resistor
48
Itotal = I1+I2
48
VAR1' Ratio = 1
49
Resistor
50
Graphics Page 0 to 200 mA
50
Cabling and Fixturing Issues
51
Simplified Diagram
52
Kelvin Triaxial Cable
56
Why Kelvin Measurements?
57
Cable Connections
59
Class Example - Jumper Leads
60
2. Click Recall button
61
To Get REKELV Test Setup:
61
Single Kelvin Measurement
62
Non-Kelvin Measurement
63
To Kelvin Probe
64
To Guarded Chuck
64
Connector Plate
65
Guarded to within 2mm of tip
67
Single Triax Kelvin Triax
67
Triaxial Probes
67
Simplifying RF Connections
68
Interlock Connection
69
16493J-001 1.5 m cable
70
16493J-002 3.0 m cable
70
16442A/B Fixture
70
16058A Fixture Compatibility
71
6 Low Current Measurement
73
Low Current Measurement
75
What is possible?
75
Challenges
76
Clean Probing Environment
77
What is Required?
77
Where to Start?
78
Low Current
79
Calibration & Zero Cancel
79
Calibration
80
Measurements Near Zero fA
81
ZERO CHECK - No cable
82
Using Default SMU Setup
82
Delete SMU1 and SMU2
83
Change Mode to V and
83
Function to VAR1
83
ZERO CHECK
83
Channel Setup
83
Do not change this screen
84
Display Setup
86
Bumping cable
88
Bending Cable
88
Effect of cable movement
88
Appendix: Using ASU
89
Configuration
90
HRSMU+ASU
91
Low Current Subthreshold
92
SD214DE MOS Subthreshold
94
Trade Off Speed vs Accuracy
95
What is measured?
96
Low Current Gummel Plot
97
Module 6
98
Small step size
99
Negative sweep values
99
Range and Integration Time
100
Maximum resolution
100
Gummel Plot
100
LOW CURRENT MEASUREMENT
101
Gummel Plot With
102
ULTRA LOW CURRENT
103
Subthreshold Curve
103
Small STEP: 100 mV
104
Large HOLD TIME: 3 sec
104
Measurement Setup
104
Set long integration time
106
Leakage to fA levels
107
Chuck must be guarded
107
Fowler-Nordheim (FN) Plot
108
Negative sweep
109
Accumulation mode
109
Wait for 5 V initial step
109
FOWLER-NORDHEIM PLOT
109
Measurement Page
109
Low Current Gate Oxide Meas
110
Using Guarded Chuck
110
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